In-Plane Texturing in Sputtered Films
نویسندگان
چکیده
منابع مشابه
Surface roughness and in-plane texturing in sputtered thin films
Real surfaces are not flat on an atomic scale. Studying the effects of roughness on microstructural evolution is of relevance because films are sputtered onto nonideal surfaces in many applications. To this end, amorphous rough substrates of two different morphologies, either elongated mounds or facets, were fabricated. The microstructural development of films deposited onto these surfaces was ...
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ژورنال
عنوان ژورنال: Textures and Microstructures
سال: 2000
ISSN: 0730-3300,1029-4961
DOI: 10.1155/tsm.34.91